Advanced Etch Technology and Process Integration for Nanopatterning XII
| Daljnji autori: | |
|---|---|
| Format: | Elektronički e-knjiga |
| Jezik: | engleski |
| Izdano: |
SPIE Digital Library,
1/1/23
|
| Teme: | |
| Online pristup: | Full text available on Research4Life (SPIE Digital Library) |
| Opis predmeta: | <strong>On-Campus Access Only (IP based access)</strong> |
|---|---|
| Opis fizičkog objekta: | 1 online resource |
| Format: | Mode of access: Internet |
| ISBN: | 9781510661059 9781510661066 |
| Pristup: | Electronic access restricted to authorized AUW faculty, staff and students |