APA (7th ed.) Zitazioa

Naulleau, P. P. International Conference on Extreme Ultraviolet Lithography 2023. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Naulleau, Patrick P. International Conference on Extreme Ultraviolet Lithography 2023. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Naulleau, Patrick P. International Conference on Extreme Ultraviolet Lithography 2023. SPIE Digital Library.

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