APA (7th ed.) Citation

Behringer, U. F. 38th European Mask and Lithography Conference (EMLC 2023). SPIE Digital Library.

Chicago Style (17th ed.) Citation

Behringer, Uwe F.W. 38th European Mask and Lithography Conference (EMLC 2023). SPIE Digital Library.

MLA (9th ed.) Citation

Behringer, Uwe F.W. 38th European Mask and Lithography Conference (EMLC 2023). SPIE Digital Library.

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