Kojima, Y. Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Kojima, Yosuke. Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
Tohutoro MLA (9th ed.)Kojima, Yosuke. Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
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