APA (7th ed.) Zitazioa

Cain, J. Metrology, Inspection, and Process Control for Microlithography XXIX. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Cain, Jason. Metrology, Inspection, and Process Control for Microlithography XXIX. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Cain, Jason. Metrology, Inspection, and Process Control for Microlithography XXIX. SPIE Digital Library.

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