Cain, J. Metrology, Inspection, and Process Control for Microlithography XXIX. SPIE Digital Library.
Chicago Style (17. basım) AtıfCain, Jason. Metrology, Inspection, and Process Control for Microlithography XXIX. SPIE Digital Library.
MLA (9th ed.) AtıfCain, Jason. Metrology, Inspection, and Process Control for Microlithography XXIX. SPIE Digital Library.
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