APA (7th ed.) Citation

Lai, K. Optical Microlithography XXVIII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Lai, Kafai. Optical Microlithography XXVIII. SPIE Digital Library.

MLA (9th ed.) Citation

Lai, Kafai. Optical Microlithography XXVIII. SPIE Digital Library.

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