APA (7th ed.) Citation

Lin, Q. Advanced Etch Technology for Nanopatterning IV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Lin, Qinghuang. Advanced Etch Technology for Nanopatterning IV. SPIE Digital Library.

MLA (9th ed.) Citation

Lin, Qinghuang. Advanced Etch Technology for Nanopatterning IV. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.