Lin, Q. Advanced Etch Technology for Nanopatterning IV. SPIE Digital Library.
Citación estilo ChicagoLin, Qinghuang. Advanced Etch Technology for Nanopatterning IV. SPIE Digital Library.
Cita MLALin, Qinghuang. Advanced Etch Technology for Nanopatterning IV. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.