APA (7th ed.) Citation

Sanchez, M. Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Sanchez, Martha. Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020. SPIE Digital Library.

MLA (9th ed.) Citation

Sanchez, Martha. Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.