Sanchez, M. Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020. SPIE Digital Library.
Citação norma ChicagoSanchez, Martha. Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020. SPIE Digital Library.
Citação norma MLASanchez, Martha. Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020. SPIE Digital Library.
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