Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020

Bibliográfalaš dieđut
Eará dahkkit: Sanchez, Martha
Materiálatiipa: Elektrovnnalaš E-girji
Giella:eaŋgalasgiella
Almmustuhtton: SPIE Digital Library, 4/21/20
Fáttát:
Liŋkkat:Full text available on Research4Life (SPIE Digital Library)
Govvádus
Fuomášahttimat:<strong>On-Campus Access Only (IP based access)</strong>
Olgguldas hápmi:1 online resource
Materiálatiipa:Mode of access: Internet
ISBN:9781510634152
9781510634169
Beassan:Electronic access restricted to authorized AUW faculty, staff and students