Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020

Bibliografiska uppgifter
Övriga skapare: Sanchez, Martha
Materialtyp: Elektronisk E-bok
Språk:engelska
Publicerad: SPIE Digital Library, 4/21/20
Ämnen:
Länkar:Full text available on Research4Life (SPIE Digital Library)
Beskrivning
Beskrivning:<strong>On-Campus Access Only (IP based access)</strong>
Fysisk beskrivning:1 online resource
Materialtyp:Mode of access: Internet
ISBN:9781510634152
9781510634169
Tillgång:Electronic access restricted to authorized AUW faculty, staff and students