APA (7th ed.) Citation

Adan, O. Metrology, Inspection, and Process Control for Microlithography XXXIV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Adan, Ofer. Metrology, Inspection, and Process Control for Microlithography XXXIV. SPIE Digital Library.

MLA (9th ed.) Citation

Adan, Ofer. Metrology, Inspection, and Process Control for Microlithography XXXIV. SPIE Digital Library.

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