APA (7th ed.) Zitazioa

Adan, O. Metrology, Inspection, and Process Control for Microlithography XXXIV. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Adan, Ofer. Metrology, Inspection, and Process Control for Microlithography XXXIV. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Adan, Ofer. Metrology, Inspection, and Process Control for Microlithography XXXIV. SPIE Digital Library.

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