Cita APA

Adan, O. Metrology, Inspection, and Process Control for Microlithography XXXIV. SPIE Digital Library.

Citación estilo Chicago

Adan, Ofer. Metrology, Inspection, and Process Control for Microlithography XXXIV. SPIE Digital Library.

Cita MLA

Adan, Ofer. Metrology, Inspection, and Process Control for Microlithography XXXIV. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.