Advanced Etch Technology for Nanopatterning IX

Bibliográfalaš dieđut
Eará dahkkit: Wise, Rich
Materiálatiipa: Elektrovnnalaš E-girji
Giella:eaŋgalasgiella
Almmustuhtton: SPIE Digital Library, 1/1/20
Fáttát:
Liŋkkat:Full text available on Research4Life (SPIE Digital Library)
Govvádus
Fuomášahttimat:<strong>On-Campus Access Only (IP based access)</strong>
Olgguldas hápmi:1 online resource
Materiálatiipa:Mode of access: Internet
ISBN:9781510634251
9781510634268
Beassan:Electronic access restricted to authorized AUW faculty, staff and students