Guerrero, D. A Lithographer’s Guide to Patterning CMOS Devices with Directed Self-Assembly. SPIE Digital Library.
Chicago-viite (17. p.)Guerrero, Douglas. A Lithographer’s Guide to Patterning CMOS Devices with Directed Self-Assembly. SPIE Digital Library.
MLA-viite (9. p.)Guerrero, Douglas. A Lithographer’s Guide to Patterning CMOS Devices with Directed Self-Assembly. SPIE Digital Library.
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