A Lithographer’s Guide to Patterning CMOS Devices with Directed Self-Assembly
| Hlavní autor: | |
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| Médium: | Elektronický zdroj E-kniha |
| Jazyk: | angličtina |
| Vydáno: |
SPIE Digital Library,
1/1/20
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| Témata: | |
| On-line přístup: | Full text available on Research4Life (SPIE Digital Library) |
| Popis jednotky: | <strong>On-Campus Access Only (IP based access)</strong> |
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| Fyzický popis: | 1 online resource |
| Médium: | Mode of access: Internet |
| ISBN: | 9781510637016 |
| Přístup: | Electronic access restricted to authorized AUW faculty, staff and students |