A Lithographer’s Guide to Patterning CMOS Devices with Directed Self-Assembly
| Автор: | |
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| Формат: | Електронний ресурс eКнига |
| Мова: | Англійська |
| Опубліковано: |
SPIE Digital Library,
1/1/20
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| Предмети: | |
| Онлайн доступ: | Full text available on Research4Life (SPIE Digital Library) |
| Опис примірника: | <strong>On-Campus Access Only (IP based access)</strong> |
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| Фізичний опис: | 1 online resource |
| Формат: | Mode of access: Internet |
| ISBN: | 9781510637016 |
| Доступ: | Electronic access restricted to authorized AUW faculty, staff and students |