Naulleau, P. Extreme Ultraviolet Lithography 2020. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Naulleau, Patrick. Extreme Ultraviolet Lithography 2020. SPIE Digital Library.
Tohutoro MLA (9th ed.)Naulleau, Patrick. Extreme Ultraviolet Lithography 2020. SPIE Digital Library.
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