Burn, J. L. Optical Lithography: Here is Why, Second Edition. SPIE Digital Library.
Citación estilo ChicagoBurn, J. Lin. Optical Lithography: Here Is Why, Second Edition. SPIE Digital Library.
Cita MLABurn, J. Lin. Optical Lithography: Here Is Why, Second Edition. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.