Burn, J. L. Optical Lithography: Here is Why, Second Edition. SPIE Digital Library.
Chicago (17e ed.) BronvermeldingBurn, J. Lin. Optical Lithography: Here Is Why, Second Edition. SPIE Digital Library.
MLA (9e ed.) BronvermeldingBurn, J. Lin. Optical Lithography: Here Is Why, Second Edition. SPIE Digital Library.
Let op: Deze citaties zijn niet altijd 100% accuraat.