APA (7th ed.) Citation

Felix, N. Extreme Ultraviolet (EUV) Lithography XII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Felix, Nelson. Extreme Ultraviolet (EUV) Lithography XII. SPIE Digital Library.

MLA (9th ed.) Citation

Felix, Nelson. Extreme Ultraviolet (EUV) Lithography XII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.