Adan, O. Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV. SPIE Digital Library.
Chicago Style (17. basım) AtıfAdan, Ofer. Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV. SPIE Digital Library.
MLA (9th ed.) AtıfAdan, Ofer. Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV. SPIE Digital Library.
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