APA (7th ed.) Citation

Owa, S. Optical Microlithography XXXIV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Owa, Soichi. Optical Microlithography XXXIV. SPIE Digital Library.

MLA (9th ed.) Citation

Owa, Soichi. Optical Microlithography XXXIV. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.