Bannister, J. Advanced Etch Technology and Process Integration for Nanopatterning X. SPIE Digital Library.
Chicago (17e ed.) BronvermeldingBannister, Julie. Advanced Etch Technology and Process Integration for Nanopatterning X. SPIE Digital Library.
MLA (9e ed.) BronvermeldingBannister, Julie. Advanced Etch Technology and Process Integration for Nanopatterning X. SPIE Digital Library.
Let op: Deze citaties zijn niet altijd 100% accuraat.