Ando, A. Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
Cita Chicago (17th ed.)Ando, Akihiko. Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
Cita MLA (9th ed.)Ando, Akihiko. Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
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