APA citiranje

Goldberg, K. Extreme Ultraviolet (EUV) Lithography X. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Goldberg, Kenneth. Extreme Ultraviolet (EUV) Lithography X. SPIE Digital Library.

MLA citiranje

Goldberg, Kenneth. Extreme Ultraviolet (EUV) Lithography X. SPIE Digital Library.

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