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00000cam a2200000 a 4500 |
| 001 |
AUWConferenceProceedingsResearch4Life(SPIE)004181 |
| 008 |
260223c9999 xx r poo 0 0eng d |
| 020 |
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|a 9781510625693
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| 020 |
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|a 9781510625709
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| 040 |
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|a BDCtgAUW
|c BDCtgAUW
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| 245 |
0 |
0 |
|h [electronic resource]
|a Optical Microlithography XXXII
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| 260 |
|
1 |
|b SPIE Digital Library,
|c 6/17/19
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| 300 |
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|a 1 online resource
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| 500 |
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|a <strong>On-Campus Access Only (IP based access)</strong>
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| 506 |
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|a Electronic access restricted to authorized AUW faculty, staff and students
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| 538 |
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|a Mode of access: Internet
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| 655 |
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7 |
|a Conference papers and proceedings.
|2 Library of Congress
|
| 700 |
1 |
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|a Kye, Jongwook
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| 856 |
4 |
0 |
|z Full text available on Research4Life (SPIE Digital Library)
|u https://login.research4life.org/tacsgr1www_spiedigitallibrary_org/conference-proceedings-of-spie/10961
|