Panning, E. Extreme Ultraviolet (EUV) Lithography VIII. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Panning, Eric. Extreme Ultraviolet (EUV) Lithography VIII. SPIE Digital Library.
Tohutoro MLA (9th ed.)Panning, Eric. Extreme Ultraviolet (EUV) Lithography VIII. SPIE Digital Library.
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