APA (7th ed.) Citation

Sanchez, M. Metrology, Inspection, and Process Control for Microlithography XXXI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Sanchez, Martha. Metrology, Inspection, and Process Control for Microlithography XXXI. SPIE Digital Library.

MLA (9th ed.) Citation

Sanchez, Martha. Metrology, Inspection, and Process Control for Microlithography XXXI. SPIE Digital Library.

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