Cita APA

Sanchez, M. Metrology, Inspection, and Process Control for Microlithography XXXI. SPIE Digital Library.

Citación estilo Chicago

Sanchez, Martha. Metrology, Inspection, and Process Control for Microlithography XXXI. SPIE Digital Library.

Cita MLA

Sanchez, Martha. Metrology, Inspection, and Process Control for Microlithography XXXI. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.