Sanchez, M. Metrology, Inspection, and Process Control for Microlithography XXXI. SPIE Digital Library.
Čikaški stil citiranja (17. izdanje)Sanchez, Martha. Metrology, Inspection, and Process Control for Microlithography XXXI. SPIE Digital Library.
MLA način citiranja (9. izdanje)Sanchez, Martha. Metrology, Inspection, and Process Control for Microlithography XXXI. SPIE Digital Library.
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