Sanchez, M. Metrology, Inspection, and Process Control for Microlithography XXXI. SPIE Digital Library.
Citazione stile Chigago Style (17a edizione)Sanchez, Martha. Metrology, Inspection, and Process Control for Microlithography XXXI. SPIE Digital Library.
Citatione MLA (9a ed.)Sanchez, Martha. Metrology, Inspection, and Process Control for Microlithography XXXI. SPIE Digital Library.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.