Sanchez, M. Metrology, Inspection, and Process Control for Microlithography XXXI. SPIE Digital Library.
Chicago Style (17. basım) AtıfSanchez, Martha. Metrology, Inspection, and Process Control for Microlithography XXXI. SPIE Digital Library.
MLA (9th ed.) AtıfSanchez, Martha. Metrology, Inspection, and Process Control for Microlithography XXXI. SPIE Digital Library.
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