Cita APA

Erdmann, A. Optical Microlithography XXX. SPIE Digital Library.

Citación estilo Chicago

Erdmann, Andreas. Optical Microlithography XXX. SPIE Digital Library.

Cita MLA

Erdmann, Andreas. Optical Microlithography XXX. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.