APA (7th ed.) Citation

Engelmann, S. Advanced Etch Technology for Nanopatterning VI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Engelmann, Sebastian. Advanced Etch Technology for Nanopatterning VI. SPIE Digital Library.

MLA (9th ed.) Citation

Engelmann, Sebastian. Advanced Etch Technology for Nanopatterning VI. SPIE Digital Library.

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