Style de citation APA (7e éd.)

Monahan, K. Handbook of Critical Dimension Metrology and Process Control: A Critical Review. SPIE Digital Library.

Style de citation Chicago (17e éd.)

Monahan, Kevin. Handbook of Critical Dimension Metrology and Process Control: A Critical Review. SPIE Digital Library.

Style de citation MLA (9e éd.)

Monahan, Kevin. Handbook of Critical Dimension Metrology and Process Control: A Critical Review. SPIE Digital Library.

Attention : ces citations peuvent ne pas être correctes à 100%.