Behringer, U. 33rd European Mask and Lithography Conference. SPIE Digital Library.
Chicago Style (17. basım) AtıfBehringer, Uwe. 33rd European Mask and Lithography Conference. SPIE Digital Library.
MLA (9th ed.) AtıfBehringer, Uwe. 33rd European Mask and Lithography Conference. SPIE Digital Library.
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