APA (7th ed.) Citation

Dey, J. Developments in Semiconductor Microlithography IV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Dey, James. Developments in Semiconductor Microlithography IV. SPIE Digital Library.

MLA (9th ed.) Citation

Dey, James. Developments in Semiconductor Microlithography IV. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.