Dey, J. Developments in Semiconductor Microlithography V. SPIE Digital Library.
Chicagoスタイル(17版)引用形式Dey, James. Developments in Semiconductor Microlithography V. SPIE Digital Library.
MLA(9版)引用形式Dey, James. Developments in Semiconductor Microlithography V. SPIE Digital Library.
警告: この引用は必ずしも正確ではありません.