Dey, J. Developments in Semiconductor Microlithography V. SPIE Digital Library.
Chicago-viite (17. p.)Dey, James. Developments in Semiconductor Microlithography V. SPIE Digital Library.
MLA-viite (9. p.)Dey, James. Developments in Semiconductor Microlithography V. SPIE Digital Library.
Varoitus: Nämä viitteet eivät aina ole täysin luotettavia.