APA ציטוט

Dey, J. Developments in Semiconductor Microlithography V. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Dey, James. Developments in Semiconductor Microlithography V. SPIE Digital Library.

ציטוט MLA

Dey, James. Developments in Semiconductor Microlithography V. SPIE Digital Library.