Stover, H. Optical Microlithography I: Technology for the Mid-1980s. SPIE Digital Library.
Chicago Style (17th ed.) ZitazioaStover, Harry. Optical Microlithography I: Technology for the Mid-1980s. SPIE Digital Library.
MLA (9th ed.) ZitazioaStover, Harry. Optical Microlithography I: Technology for the Mid-1980s. SPIE Digital Library.
Kontuz: berrikusi erreferentzia hauek erabili aurretik.