Stover, H. Optical Microlithography I: Technology for the Mid-1980s. SPIE Digital Library.
Chicago-čujuhus (17. p.)Stover, Harry. Optical Microlithography I: Technology for the Mid-1980s. SPIE Digital Library.
MLA-čujuhus (9. p.)Stover, Harry. Optical Microlithography I: Technology for the Mid-1980s. SPIE Digital Library.
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