Stover, H. Optical Microlithography II: Technology for the 1980s. SPIE Digital Library.
Chicago-viite (17. p.)Stover, Harry. Optical Microlithography II: Technology for the 1980s. SPIE Digital Library.
MLA-viite (9. p.)Stover, Harry. Optical Microlithography II: Technology for the 1980s. SPIE Digital Library.
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