APA (7th ed.) Citation

Wilson, A. X-Ray Lithography and Applications of Soft X-Rays to Technology. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Wilson, Alan. X-Ray Lithography and Applications of Soft X-Rays to Technology. SPIE Digital Library.

MLA (9th ed.) Citation

Wilson, Alan. X-Ray Lithography and Applications of Soft X-Rays to Technology. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.