Stover, H. Optical Microlithography III: Technology for the Next Decade. SPIE Digital Library.
Chicago Style (17th ed.) ZitazioaStover, Harry. Optical Microlithography III: Technology for the Next Decade. SPIE Digital Library.
MLA (9th ed.) ZitazioaStover, Harry. Optical Microlithography III: Technology for the Next Decade. SPIE Digital Library.
Kontuz: berrikusi erreferentzia hauek erabili aurretik.