Stover, H. Optical Microlithography III: Technology for the Next Decade. SPIE Digital Library.
Lua i Stíl Chicago (17ú heag.)Stover, Harry. Optical Microlithography III: Technology for the Next Decade. SPIE Digital Library.
Lua MLA (9ú heag.)Stover, Harry. Optical Microlithography III: Technology for the Next Decade. SPIE Digital Library.
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